A plate support in said body, a diaphragm plate formed with a plurality of passages and having a hollow trunk mounted on said support and separating said valve body into input and output chambers, one of said chambers including a portion within said trunk and the other of said chambers including a portion exterior to said trunk, a valve cover connected to said body on one side of said plate to define therewith an operation chamber, a diaphragm having its outer periphery fixed to said body and extending across said chamber and across said diaphragm plate, said diaphragm having portions adjacent said passages that are flexible and relatively unrestrained whereby such diaphragm portions may flex to peel from said diaphragm plate passages to progressively cover or uncover more area of said passages as more of said diaphragm is displaced from or toward said passages,Instrument Manifolds a retainer plate having a diameter at least equal to the diameter of said hollow trunk, said retainer plate being positioned in said operating chamber between said cover and diaphragm and in contact with said diaphragm, and means for urging said retainer plate toward said diaphragm plate, Bellow Seal Valvesaid diaphragm being fixed at points at its periphery corresponding to points of said valve body, said points of said diaphragm being spaced from one another by greater distances than said points of said valve body whereby the diaphragm is free to bend at various portions thereof without stretching, said diaphragm being free of attachment except at its periphery.

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